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US 2026/0211344 A1Published application
Semiconductor lithography apparatus for measuring and/or registering structures and methods for measuring and/or registering structures
OwnerRoman Schmeissner, Ulrich Matejka +1inventors
InventorsRoman Schmeissner, Ulrich Matejka, Uwe Horn
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Abstract
The disclosure relates to a semiconductor lithography apparatus and method for measuring and/or registering structures on an object by means of illumination and an optical unit for illuminating the structure. The apparatus and method are distinguished in that the illumination is in the form of dark field illumination.
Claims19
A semiconductor lithography apparatus for measuring and/or registering structures on an object by means of an illumination and an optics unit for illuminating the structure,
- characterized in that
- the illumination is in the form of a dark field illumination.
Dependencies are inferred from the claim text.