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US 2026/0211340 A1Published application
Stage apparatus, substrate processing apparatus and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsYUICHI OZAWA, SHOHEI IWATA
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Abstract
A stage apparatus including a stage configured to hold an object, a driving unit configured to drive the stage, a thrust unit configured to output a thrust to reduce influence of a reaction force associated with the driving of the stage by the driving unit, and a generation unit configured to generate a thrust signal indicating the thrust that the thrust unit should output, based on a profile signal indicating a control target of the stage and an operation signal indicating an operation amount of the stage to be input to the driving unit.
Claims16
A stage apparatus comprising:
- a stage configured to hold an object;
- a driving unit configured to drive the stage;
- a thrust unit configured to output a thrust to reduce influence of a reaction force associated with the driving of the stage by the driving unit;
- and
- a generation unit configured to generate a thrust signal indicating the thrust that the thrust unit should output, based on a profile signal indicating a control target of the stage and an operation signal indicating an operation amount of the stage to be input to the driving unit.
2 more elements
Dependencies are inferred from the claim text.