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US 2026/0211313 A1Published application
Laser processing unit and method and apparatus for managing masks
AssigneeORC Manufacturing Co., Ltd.
InventorsAkira NAKAZAWA, Kohei YAMABE, Hiromu KOBAYASHI
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Abstract
A laser-processing unit includes: a light source configured to oscillate a laser beam; an illumination optical unit configured to form a laser beam for processing from an oscillated laser beam, the laser beam for processing being used to irradiate a mask mounted on a mask stage; and a measuring processor configured to record a value corresponding to the cumulative amount of irradiation energy from the laser beam for processing, in accordance to an irradiation position.
Claims13
A laser-processing unit, comprising:
- a light source configured to oscillate a laser beam;
- an illumination optical unit configured to form a laser beam for processing from an oscillated laser beam, the laser beam for processing irradiating a mask mounted on a mask stage;
- and
- a measuring processor configured to record a value corresponding to the cumulative irradiation energy from the laser beam for processing, in accordance to an irradiation position.
1 more element
An apparatus for managing masks, comprising:
- a measuring processor configured to record a value corresponding to cumulative irradiation energy from a laser beam for processing, in accordance to an irradiation position;
- and
- a managing processor configured to manage usage status of said mask based on the value corresponding to irradiation energy.
A method for managing masks, comprising:
- a) recording a value corresponding to cumulative irradiation energy from the laser beam for processing, in accordance to an irradiation position, the laser beam for processing irradiating a mask mounted on a mask stage provided in a laser-processing unit;
- and
- b) managing usage status of said mask based on the value corresponding to cumulative irradiation energy.
Dependencies are inferred from the claim text.