Transmissive grating-based scanner for small waveguide coupling walk-off
AssigneeMeta Platforms Technologies, LLC
InventorsYoumin WANG, Min Chul SHIN, Ehsan VADIEE
Life of this patent
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Abstract
Design and fabrication of a micro rotary scanning element for waveguide based display in wearable augmented reality/virtual reality (AR/VR) devices is disclosed. In examples, a micro rotary scanning element for an augmented reality/virtual reality (AR/VR) display device, the micro rotary scanning element, comprising a transmissive grating structure, and an angular comb drive structure, wherein the transmissive grating structure is to diffract received collimated light and is anchored to the angular comb drive structure, and the angular comb drive structure comprises a plurality of inter-positioned comb elements to provide angular rotation to the transmissive grating structure.
Claims20
A method to fabricate a micro rotary scanning device comprising:
- oxidizing a first wafer to form a grating structure;
- removing a portion of a silicon substrate of the first wafer underneath the grating structure through wet silicon etching;
- oxidizing a second wafer;
- forming a comb drive structure through etching;
- and
- removing a portion of a silicon substrate of the second wafer underneath the comb drive structure through wet silicon etching.
A micro rotary scanning element for an augmented reality / virtual reality (AR/VR) display device, the micro rotary scanning element, comprising:
- a transmissive grating structure;
- and
- an angular comb drive structure, wherein
- the transmissive grating structure is to diffract received collimated light and is anchored to the angular comb drive structure, and
- the angular comb drive structure comprises a plurality of inter-positioned comb elements to provide angular rotation to the transmissive grating structure.
A non-transitory computer readable medium configured to store program code instructions, when executed by a processor, cause the processor to perform steps comprising:
- oxidize a first wafer to form a grating structure;
- remove a portion of a silicon substrate of the first wafer underneath the grating structure through wet silicon etching;
- oxidize a second wafer;
- form a comb drive structure through etching;
- and
- remove a portion of a silicon substrate of the second wafer underneath the comb drive structure through wet silicon etching.
Dependencies are inferred from the claim text.