Semiconductor device and method for manufacturing the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChia-Wei CHIANG, Yi Min WANG, Lian Wee LUO, Chun-Pei WU, Tse-En CHANG
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Abstract
A semiconductor device is provided. The semiconductor device includes a first slab, and a second slab adjacent to the first slab. A first thickness of the first slab is larger than a second thickness of the second slab. The semiconductor device further includes at least one first waveguide on the first slab and a multi-mode interferometer on the first slab and the second slab coupled with the at least one first waveguide. An interface between the first slab and the second slab is below the multi-mode interferometer.
Claims20
A semiconductor device, comprising:
- a first slab;
- a second slab adjacent to the first slab, wherein a first thickness of the first slab is larger than a second thickness of the second slab;
- at least one first waveguide on the first slab;
- and
- a multi-mode interferometer on the first slab and the second slab coupled with the at least one first waveguide, wherein an interface between the first slab and the second slab is below the multi-mode interferometer.
A semiconductor device, comprising:
- a first slab;
- a second slab adjacent to the first slab, wherein a first thickness of the first slab is larger than a second thickness of the second slab;
- and
- a multi-mode interferometer on the first slab and the second slab, wherein an interface between the first slab and the second slab is below the multi-mode interferometer, the multi-mode interferometer includes a low field amplitude region located at an end of the multi-mode interferometer, and the interface is arranged in the low field amplitude region.
A method for manufacturing a semiconductor device, comprising:
- forming a first slab;
- forming a second slab adjacent to the first slab, wherein a first thickness of the first slab is larger than a second thickness of the second slab;
- forming at least one first waveguide on the first slab;
- and
- forming a multi-mode interferometer on the first slab and the second slab coupled with the at least one first waveguide, wherein an interface between the first slab and the second slab is below the multi-mode interferometer.
Dependencies are inferred from the claim text.