Sample Holder and Measurement Method for Scanning Tunneling Microscopy
AssigneeNational Taiwan University
InventorsYa-Ping Chiu, Bo-Chao Huang, Zi-Liang Yang
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AssigneeNational Taiwan University
InventorsYa-Ping Chiu, Bo-Chao Huang, Zi-Liang Yang
Estimating the term…
A multifunctional sample holder for conducting in-situ cross-sectional scanning tunneling microscopy measurements under ultra-high vacuum (UHV) is provided. This sample holder is designed for use in UHV and at low temperatures. It comprises an insulating plate made of a vacuum-compatible polymer (for example, PCTFE) and a conductive plate made of a highly conductive metal (for example, gold-plated beryllium copper). A sample-fixing assembly ensures that the sample remains stably upright during in-situ cleaving, thus exposing a fresh cross section for atomic-scale imaging. The sample holder includes electrical contact elements for applying bias voltage and injecting current, and it features functional elements such as heating elements, temperature sensors, or magnetic field components arranged on or inside the sample holder. These features make it possible to perform cross-sectional scanning tunneling microscopy measurements under controlled voltage, temperature, and magnetic field conditions simultaneously, enabling comprehensive atomic-level analysis of semiconductor devices and other advanced materials.
A multifunctional sample holder for performing in-situ cross-sectional scanning tunneling microscopy measurements under ultra-high vacuum conditions, the sample holder being configured to operate under ultra-high vacuum and comprising:
A method for performing in-situ cross-sectional scanning tunneling microscopy measurements on a sample under ultra-high vacuum conditions, the method comprising:
Dependencies are inferred from the claim text.