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US 2026/0210902 A1Published application
Gas sensing chip, manufacturing method thereof and gas sensing device
AssigneeNational Tsing Hua University
InventorsYu-Lun CHUEH, Ruei-Hong CYU, Tzu-Wen KUO
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Abstract
A manufacturing method of a gas sensing chip includes the steps as follows. A two-dimensional semiconductor is provided, and a gas selectivity-enhancing compound is coated on a surface of the two-dimensional semiconductor. The gas selectivity-enhancing compound includes at least one of hexagonal boron nitride, zeolitic imidazolate framework and copper phthalocyanine.
Claims20
A manufacturing method of a gas sensing chip, comprising:
- providing a two-dimensional semiconductor;
- and
- coating a gas selectivity-enhancing compound on a surface of the two-dimensional semiconductor;
- wherein the gas selectivity-enhancing compound comprises at least one of hexagonal boron nitride, zeolitic imidazolate framework and copper phthalocyanine.
1 more element
A gas sensing chip, comprising:
- a two-dimensional semiconductor thin film;
- and
- a gas selectivity-enhancing compound layer disposed on a surface of the two-dimensional semiconductor thin film;
- wherein a material of the gas selectivity-enhancing compound layer comprises at least one of hexagonal boron nitride, zeolitic imidazolate framework and copper phthalocyanine.
1 more element
Dependencies are inferred from the claim text.