Monitoring tool and method of use
AssigneeGlobalFoundries U.S. Inc.
InventorsTobias Kraeusslein, Richard P. Good
Life of this patent
Estimating the term…
Abstract
The present disclosure relates to a monitoring tool and, more particularly, to a monitoring tool and method of use. The method includes: obtaining, by a computing device, an image of a tool used in processing equipment; comparing, by the computing device, a first side of the tool to a second side of the tool; determining, by the computing device, whether there is an asymmetry between the first side of the tool and the second side of the tool; and providing, by the computing device, a notification that there is the asymmetry between the first side of the tool and the second side of the tool.
Claims20
A method, comprising:
- obtaining, by a computing device, an image of a tool used in processing equipment;
- comparing, by the computing device, a first side of the tool to a second side of the tool;
- determining, by the computing device, whether there is an asymmetry between the first side of the tool and the second side of the tool;
- and
- providing, by the computing device, a notification that there is the asymmetry between the first side of the tool and the second side of the tool.
A computer program product comprising one or more computer readable storage media having program instructions collectively stored on the one or more computer readable storage media, the program instructions executable to:
- obtain an image of a dispensing nozzle taken by camera;
- identify a tip of the dispensing nozzle and its center point by performing edge detection on the image;
- compare sides of the dispensing nozzle from the image to ascertain one of symmetry and asymmetry at the tip of the dispensing nozzle;
- determine that the asymmetry is above a control threshold limit;
- and
- provide a notification of the asymmetry of the tip of the dispensing nozzle, upon determining that the asymmetry is above the control threshold limit.
A system comprising:
- a processor, a computer readable memory, one or more computer readable storage media, and program instructions collectively stored on the one or more computer readable storage media, the program instructions executable to:
- obtain an image of a dispensing nozzle;
- perform edge detection to center and isolate a nozzle tip of the dispensing nozzle and maximize symmetry of the image;
- quantify an asymmetry of the image by subtracting and averaging pixel deltas of the image and optimal reflection;
- compare the asymmetry versus a control limit to ascertain if the asymmetry of the image is a fault;
- and
- if the control limit is exceeded, provide a notification of contamination existing on the nozzle tip.
Dependencies are inferred from the claim text.