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US 2026/0210840 A1Published application
Inspection apparatus, and inspection method
AssigneesDAIHEN Corporation, The University of Osaka
InventorsSeiya Nitta, Keiji Kadota, Tetsuo Era, Satoru Asai, Kazufumi Nomura
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Abstract
An inspection apparatus performs a surface process of irradiating a receive position with a transmitting laser. Subsequently, inspection apparatus performs an inspection process of determining presence or absence of an anomaly of a workpiece.
Claims7
An inspection apparatus for inspecting a workpiece to be inspected, the inspection apparatus, comprising:
- a first irradiation device that irradiates a transmit position on a surface of the workpiece with a transmitting laser for generating an ultrasonic wave into the workpiece;
- a second irradiation device that irradiates a receive position on the surface of the workpiece with a receiving laser for detecting the ultrasonic wave;
- an interferometer that interferometrically measures reflected light of the receiving laser;
- and
- a controller that performs an inspection process by a result of measurement by the interferometer, the controller being configured to determine presence or absence of an anomaly of the workpiece in the inspection process, wherein
- the controller is configured to perform a surface process before the inspection process, the controller being configured to irradiate the receive position with a pre-treatment laser in the surface process, the pre-treatment laser being the transmitting laser or the receiving laser.
3 more elements
An inspection method for inspecting a workpiece to be inspected, the method comprising:
- performing a surface process;
- and
- performing an inspection process on the workpiece after performing the surface process;
- wherein
- the performing the inspection process includes:
- irradiating a transmit position on a surface of the workpiece with a transmitting laser for generating an ultrasonic wave into the workpiece;
- irradiating a receive position on the surface of the workpiece with a receiving laser for detecting the ultrasonic wave;
- and
- determining presence or absence of an anomaly of the workpiece by a result of measurement of reflected light of the receiving laser by an interferometer, wherein
- the performing the surface process includes irradiating the receive position with a pre-treatment laser, the pre-treatment laser being the transmitting laser or the receiving laser.
7 more elements
Dependencies are inferred from the claim text.