Measuring device and method for producing measuring device

A measuring device for measuring physical characteristics of objects, the measuring device comprising:

• a microfluidic chip including a flow channel configured to allow for fluid flow and an electrical sensing module configured to acquire a physical characteristic of an object in the fluid flow,
• wherein the chip comprises:
• a first semiconductor layer;
• a second semiconductor layer;
• and
• an oxide layer provided between the first and second semiconductor layers,
• wherein the first semiconductor layer is provided with a cavity, the cavity defining lateral walls of the flow channel and a bottom wall of the flow channel connecting the lateral walls,
• wherein the electrical sensing module comprises:
• at least two electrodes, one of the at least two electrodes being provided on one of the lateral walls of the flow channel, another of the at least two electrodes being provided on the other of the lateral walls of the flow channel,
• the measuring device further comprising
• an insulating filing provided adjacent to each electrode along the flow channel and configured to electrically isolate each electrode from the first semiconductor layer wherein the insulating material has a surface substantially recessed with the first semiconductor layer.