Silicon photonic wafer testing system and testing method thereof

A silicon photonics wafer testing system, comprising:

• a wafer prober comprising an upward-facing camera, a downward-facing camera, and a probe card, wherein a silicon photonics wafer is adapted to be carried on a stage of the wafer prober, and the probe card is disposed above the stage;
• an optical coupling actuator disposed on the wafer prober, wherein at least one optical fiber array is adapted to be carried on a fiber holder of the optical coupling actuator;
• an optical measurement instrument, wherein the at least one optical fiber array is located on an optical measurement path of the optical measurement instrument;
• and
• an integrated control module electrically connected to the wafer prober, the optical coupling actuator, and the optical measurement instrument, wherein the integrated control module drives the upward-facing camera to be aligned with the probe card and the at least one optical fiber array, drives the downward-facing camera to be aligned with a bonding pad of the silicon photonics wafer, and combines positional information of a coupler of the silicon photonics wafer to obtain a relative positional relationship among the probe card, the at least one optical fiber array, and the bonding pad and the coupler of the silicon photonics wafer on the wafer prober.