High temperature co-fired ceramic pressure sensor

Abstract

A pressure sensor can include a base formed from high-temperature co-fired ceramic (HTCC) material with an inner surface, a flexure plate formed from HTCC material and positioned over the surface of the base, with the flexure plate including an inner surface that faces the surface of the base and an outer surface, and a spacer having a thickness and implemented between the base and the flexure plate to define a space between the inner surfaces of the base and flexure plate. The pressure sensor can further include first and second electrodes implemented on the inner surfaces of the base and the flexure plate, respectively, to form a capacitor, such that flexing of the flexure plate due to pressure applied to the outer surface of the flexure plate results in a detectable change in capacitance of the capacitor.

Dependencies are inferred from the claim text.