Capacitive sensor
AssigneeMurata Manufacturing Co., Ltd.
InventorsAkira KONNO, Yoshitaka KATO, Sho ASANO
Life of this patent
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Abstract
A capacitive sensor is provided that detects, based on a change in electrostatic capacity of an electrode unit, a force that acts in at least one direction. The sensor includes a first substrate layer that includes a boss portion that receives the force that acts in the at least one direction and is deformed by bending due to the force; and a second substrate layer that includes a mass portion to which the force is transmitted from the boss portion. The electrode unit includes a movable electrode having the first comb-tooth structure and that is displaced in conjunction with the mass portion, and a fixed electrode having the second comb-tooth structure.
Claims20
A capacitive sensor for detecting a force in at least one direction, the capacitive sensor comprising:
- a first substrate layer including a boss portion configured to receive a force that acts in the at least one direction and that is configured to be deformed by a bending due to the force on the boss portion;
- a second substrate layer including a mass portion to which the force that acts in the at least one direction is transmitted from the boss portion;
- and
- an electrode unit that includes a movable electrode that has a first comb-tooth structure and that is displaced in conjunction with the mass portion, and a fixed electrode that has a second comb-tooth structure that faces the first comb-tooth structure,
- wherein the capacitive sensor is configured to detect the force based on a change in an electrostatic capacity of the electrode unit in response to the force acting thereon.
A capacitive sensor for detecting, based on a change in electrostatic capacity of an electrode unit, a force that acts in at least one direction of a first direction, a second direction intersecting the first direction, and a third direction intersecting both the first direction and the second direction, the capacitive sensor comprising:
- a first substrate layer including a boss portion configured to receive a force that acts in the at least one direction and that is deformable in response to the force;
- and
- a second substrate layer including a mass portion to which the force is transmitted from the boss portion,
- wherein the electrode unit comprises a movable electrode having a first comb-tooth structure and that is configured to be displaced in conjunction with the mass portion, and a fixed electrode that has a second comb-tooth structure that faces the first comb-tooth structure.
Dependencies are inferred from the claim text.