Determining process chamber component temperatures
AssigneeLam Research Corporation
InventorNoah Elliot Baker
Life of this patent
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Abstract
Methods and systems for determining temperatures are provided. In some embodiments, a method for determining temperatures comprises applying an input signal to a first conductive element of a fabrication apparatus, the input signal having a first magnitude and a first phase. The method may comprise measuring an output signal at a second conductive element of the fabrication apparatus, the output signal having a second magnitude and a second phase. The method may comprise determining a temperature of a region between the first conductive element and the second conductive element based at least in part on the second magnitude and the second phase.
Claims19
A method for determining temperatures, the method comprising:
- (a) applying an input signal to a first conductive element of a fabrication apparatus, the input signal having a first magnitude and a first phase;
- (b) measuring an output signal at a second conductive element of the fabrication apparatus, the output signal having a second magnitude and a second phase;
- and
- (c) determining a temperature of a region between the first conductive element and the second conductive element based at least in part on the second magnitude and the second phase.
An apparatus, comprising:
- a signal generator configured to apply an input signal to a first conductive element of a fabrication apparatus, the input signal having a first magnitude and a first phase;
- and
- measurement circuitry configured to:
- measure an output signal at a second conductive element of the fabrication apparatus, the output signal having a second magnitude and a second phase, and
- determine a temperature of a region between the first conductive element and the second conductive element based at least in part on the second magnitude and the second phase.
Dependencies are inferred from the claim text.