Infrared detector and associated production method
AssigneeLynred
InventorsPascal Le Boterf, Nicolas Boudou, Sylvain Lemettre
Life of this patent
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AssigneeLynred
InventorsPascal Le Boterf, Nicolas Boudou, Sylvain Lemettre
Estimating the term…
This infrared detector includes a base substrate supporting an array of micro-bolometers, each micro-bolometer mounted in suspension above the substrate by anchoring nails extending substantially perpendicularly with respect to the base substrate. Side walls extend substantially perpendicularly with respect to the base substrate, and an optical window is fixed to an upper end of the side walls above the micro-bolometers. The base substrate, the side walls, and the optical window form a vacuum sealed cavity within which the micro-bolometers are present. The infrared detector also comprises spacers extending plumb with at least 10% of the anchoring nails, these spacers being also oriented substantially perpendicularly with respect to the base substrate, said spacers forming a stop capable of cooperating with the lower face of the optical window, or with the upper end of the anchoring nails, and thus limiting the deflections of the optical window and/or of the substrate.
An infrared detector comprising:
Dependencies are inferred from the claim text.