Spectroscopic analysis device and spectroscopic analysis method
AssigneeHoriba, Ltd.
InventorSatoru WAKABAYASHI
Life of this patent
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Abstract
A spectroscopic analysis device includes an image sensor that has a first region and a second region different from the first region, and that detects light incident on the first region and the second region; a first optical system that irradiates a sample with a primary light, and that causes a secondary light generated from the sample to be incident on the first region; a second optical system that causes a standard light to be incident on the second region; and an analysis unit that corrects a detection result of the secondary light incident on the first region, based on a detection result of the standard light incident on the second region.
Claims9
1-8. (canceled)
A spectroscopic analysis device, comprising:
- an image sensor that has a first region and a second region different from the first region, and that detects light incident on the first region and the second region;
- a first optical system that irradiates a sample with a primary light, and that causes a secondary light generated from the sample to be incident on the first region;
- a second optical system that causes a standard light to be incident on the second region;
- and
- a computer,
- wherein the computer corrects a detection result of the secondary light incident on the first region, based on a detection result of the standard light incident on the second region.
A spectroscopic analysis method, comprising:
- using an image sensor that has a first region and a second region different from the first region and that detects light incident on the first region and the second region;
- causing a secondary light, which is generated from a sample irradiated with a primary light, to be incident on the first region;
- causing a standard light to be incident on the second region;
- and
- correcting a detection result of the secondary light incident on the first region, based on a detection result of the standard light incident on the second region.
Dependencies are inferred from the claim text.