Spectrometer for the spectral analysis of a specimen
AssigneeCarl Zeiss Spectroscopy GmbH
InventorsMichael BARTH, Ralf-Peter GÜNTHER, Karsten LINDIG, Günter RUDOLPH, Sebastian TANNERT, Steffen WAGNER
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AssigneeCarl Zeiss Spectroscopy GmbH
InventorsMichael BARTH, Ralf-Peter GÜNTHER, Karsten LINDIG, Günter RUDOLPH, Sebastian TANNERT, Steffen WAGNER
Estimating the term…
A spectrometer includes a radiation source for irradiating a sample with electromagnetic radiation, a dispersive element for spatiospectral splitting of the electromagnetic radiation reflected by the sample,-and a measurement window for transmitting the electromagnetic radiation generated by the radiation source to the sample and for transmitting the electromagnetic radiation reflected by the sample to the dispersive element. The electromagnetic radiation generated by the radiation source passes on a first inner beam path from the radiation source to the measurement window-and the electromagnetic radiation reflected by the sample passes on a second inner beam path from the measurement window to the dispersive element. The spectrometer also includes a spatially resolving detector for the wavelength-dependent conversion of the spatiospectrally split electromagnetic radiation. A deflection mirror is arranged on the first and second inner beam path for jointly deflecting the first inner beam path and the second inner beam path.
A spectrometer for the spectral analysis of a sample comprising:
Dependencies are inferred from the claim text.