Thermal flow meter
AssigneeSurpass Industry Co., Ltd.
InventorHiroshi IMAI
Life of this patent
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AssigneeSurpass Industry Co., Ltd.
InventorHiroshi IMAI
Estimating the term…
Provided is a thermal flow meter including: a measurement tube having an internal flow channel formed therein, having a flat surface formed to a part of an outer circumferential face thereof, and formed of a resin material; a temperature detecting substrate having a heating resistance wire and a temperature detecting resistance wire formed on a flat detection surface in which the detection surface is joined to the flat surface of the measurement tube along the axis; and a gas permeation blocking sheet arranged between the flat surface of the measurement tube and the detection surface so as to cover the flat surface and configured to prevent a gas permeating the measurement tube from reaching the detection surface, the top face of the gas permeation blocking sheet is joined to the flat surface, and the bottom face of the gas permeation blocking sheet is joined to the detection surface.
A thermal flow meter comprising:
Dependencies are inferred from the claim text.