Thermoelectric Temperature Controller
OwnerBram VAN DE MOORTELinventor
Life of this patent
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Abstract
The invention relates to an improved apparatus for temperature control of liquid chemicals in a sealable container, typically a bubbler container, inter alia for use in chemical vapor deposition (CVD).
Claims15
A thermoelectric apparatus for temperature control of liquid chemicals in a sealable container, the container comprising a bottom wall, upstanding side walls, and a top wall, wherein the container is further provided with a temperature probe for measuring the temperature of the chemicals in the container, an inlet for receiving a carrier gas to below the level of the liquid chemicals, and an outlet for removing atmospheric gas from the container, the apparatus comprising:
- a. a thermally conductive support platform, suitable for receiving the container thereon and cooling and/or heating the container and the chemicals therein;
- b. a cooling plate configured for dissipating excess heat;
- c. a thermoelectric element configured for controllably transferring heat between a first and a second side of the thermoelectric element by means of passing a current through the thermoelectric element, wherein the thermoelectric element is thermally connected on the first side to the support platform, and on the second side thermally connected to the cooling plate;
- d. one or more connection points suitable for coupling to the temperature probe of the container;
- e. a control unit configured for driving the thermoelectric element by means of passing a current through the thermoelectric element, wherein the transferred heat is controlled over time by pulse width modulation of the current, wherein the pulse width modulation takes place at a frequency of at least 1,000 Hz, wherein the current is provided by means of a current source, and wherein the control unit is connected to the one or more connection points and is configured for reading out, by means of a readout unit, temperature data from a temperature probe coupled to the one or more connection points;
- f. a housing comprising a housing base and a top piece, wherein the housing base comprises the support platform, the cooling plate, the current source, the readout unit, the control unit, the one or more connection points, and the thermoelectric element, and wherein the housing base and the top piece together form a cavity suitable for form-fittingly enclosing the container over substantially its full height, wherein the top piece comprises internal side walls that partially define side walls of the cavity, and wherein said internal side walls are in thermal contact with the support platform, wherein the cooling plate is comprised in a base of the housing, wherein the support platform is provided on the base together with the side walls;
- wherein the control unit and the current source are distanced from each other over a distance greater than 50%, of the sides of the base, wherein the thermoelectric element is integrated in a thermally insulating separator which separates the cooling platform and the support platform from each other.
Dependencies are inferred from the claim text.