Pneumatic gas inlet valve with adjustable stop

A gas inlet valve for controlled inlet of a fluid into a vacuum process chamber, wherein the gas inlet valve comprises:

• a gas passage unit having a gas inlet, a gas outlet, and an inner volume connecting the gas inlet and the gas outlet, wherein the gas passage unit has a sealing surface in the inner volume,
• an adjustment device having an adjustment unit, wherein the adjustment unit projects into the inner volume and is adjustably mounted outside the gas passage unit in the adjustment device along an adjustment axis, wherein the adjustment unit has a valve disk which is arranged inside the inner volume, wherein the valve disk can be brought by means of the adjustment device in the closing direction into a closed position, in which the valve disk rests on the sealing surface and gas flow is thus prevented, and wherein the valve disk can be brought by means of the adjustment device in the opening direction into an open position, in which the valve disk is spaced from the sealing surface and a gas flow is provided, and
• a flexible sealing element which is attached to the gas passage unit and to the adjustment unit and seals the adjustment unit from the inner volume,
• wherein:
• the adjustment device has a pneumatic drive cylinder having at least one piston, wherein the piston is coupled to the adjustment unit, and an opening force can be generated in the opening direction by pressurization of the drive cylinder.
• wherein:
• the adjustment device has a limiting element, which limiting element provides a stop point which limits adjustability of the adjustment unit along the adjustment axis in the opening direction, and
• the limiting element is shaped and mounted in such a way that a position of the stop point along the installation axis can be varied by means of actuation of the limiting element, wherein the position of the stop point defines a maximum valve opening.