Pump system with electrically operated cooling device

A pump system comprising a turbomolecular vacuum pump that comprises:

• a housing having at least one pump inlet and one pump outlet;
• a first pump mechanism, which is driven by a rotor shaft and which has at least one turbomolecular pump stage, in the housing;
• and
• a second pump mechanism, which is located downstream of the first pump mechanism and which is driven by the rotor shaft, in the housing, said second pump mechanism operating according to a different pumping principle than the first pump mechanism,
• wherein, for jointly conveying a process gas from the pump inlet to the pump outlet, the first pump mechanism and the second pump mechanism are arranged along the rotor shaft and are disposed in an axial direction between the at least one pump inlet and the pump outlet, and
• wherein, to cool the housing, the pump system further comprises at least one electrically operated cooling device that is located in the axial direction with respect to the second pump mechanism on a side of the second pump mechanism that faces the first pump mechanism.