Pump and method of manufacturing a sealing
AssigneePfeiffer Vacuum Technology AG
InventorsBernd KOCI, Jonas BECKER, Sebastian LATTA
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Abstract
The present invention relates to a pump, in particular a vacuum pump, comprising a pump-active component having a coating, wherein the coating comprises an oxide layer, which is in particular formed by anodic oxidation in an acidic electrolyte and which has pores, and a fluorine-free polymer-based and/or sol-gel-based sealing, and wherein the pores of the oxide layer are at least partly covered by the sealing and/or impregnated with the sealing and/or filled with the sealing. The present invention further relates to a method of sealing a porous oxide layer.
Claims21
A method of coating a pump-active component of a pump, comprising the following steps:
- Step A) providing the pump-active component composed of a light metal workpiece and having a porous oxide layer on a surface,
- Step C) contacting the porous oxide layer with a solution comprising at least one polymerizable sealing precursor and/or at least one sol-gel-based sealing precursor,
- wherein a voltage is applied to the pump-active part during at least steps C).
A pump comprising a pump-active component, the pump active component having been formed by a method comprising the following steps:
- Step A) providing the pump-active component composed of a light metal workpiece and having a porous oxide layer on a surface,
- Step C) contacting the porous oxide layer with a solution comprising at least one polymerizable sealing precursor and/or at least one sol-gel-based sealing precursor,
- wherein a voltage is applied to the pump-active part during at least step C).
Dependencies are inferred from the claim text.