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US 2026/0209990 A1Published application
Structure comprising a high thermal conductivity boron arsenide layer, and method of manufacture
OwnerChristophe Figuetinventor
Life of this patent
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Abstract
A structure for microelectronic applications, extending along an extension plane, includes a crystalline boron arsenide BAs layer having two dimensions, each of at least 2 cm, respectively along two directions normal to each other and included in the extension plane.
Claims22
A structure for microelectronic applications, extending along an extension plane (xy), comprising a crystalline boron arsenide BAs layer having two dimensions, each of at least 2 cm, respectively along two directions (x, y) normal to each other and included in the extension plane (xy).
A method of fabricating a structure for microelectronic applications, comprising:
- providing a 3C polytype silicon carbide layer having a flat surface;
- and
- growing a crystalline boron arsenide BAs layer on the silicon carbide layer, the silicon carbide layer and the crystalline boron arsenide BAs layer having two dimensions each of at least 2 cm respectively along two directions normal to each other and included in an extension plane parallel to the flat surface of the silicon carbide layer.
Dependencies are inferred from the claim text.