Method for producing compound, polymer, composition, and pattern formation method
AssigneeMitsubishi Gas Chemical Company, Inc.
InventorsTadashi OMATSU, Kentaro KATAOKA, Masahiro MATSUMOTO, Yushi NIIMI, Takeru KOGUMA, Junya HORIUCHI, Hiroaki YAMAMOTO, Masataka IINUMA, Kodai MATSUURA, Takashi SATO, Yu OKADA, Takashi MAKINOSHIMA, Masatoshi ECHIGO
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