Mems component and method for producing a mems component

A method for producing a microelectromechanical system (MEMS) component, the MEMS component including:

• a substrate with a front side and a rear side,
• a MEMS functional unit arranged on the front side of the substrate,
• an electrical circuit unit arranged on the rear side of the substrate for applying and/or receiving and/or processing signals of the MEMS functional unit, and
• an electrical connection structure extending through the substrate, for electrically connecting the MEMS functional unit to the electrical circuit unit,
• wherein the method comprises the following subprocesses:
• providing the substrate;
• creating a first partial layer structure of the MEMS functional unit on the front side of the substrate;
• creating the electrical connection structure through the substrate;
• creating the electrical circuit unit on the rear side of the substrate;
• and
• creating a second partial layer structure on the first partial layer structure of the MEMS functional unit.