Micromechanical pressure sensor with enclosed housing wall
OwnerJennifer Lai, Alexander Littig +1inventors
InventorsJennifer Lai, Alexander Littig, Daniel Haug
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Abstract
A micromechanical pressure sensor for detecting ambient pressure. The micromechanical pressure sensor includes a sensor element having a measurement variable that varies depending on the ambient pressure; a metal housing enclosing the sensor element at least along its edges by means of a housing wall; a first protective compound which is introduced within the metal housing and in which the sensor element is embedded in a manner protected from the environment; wherein the housing wall is coated on both sides with a second protective compound. A method for constructing a micromechanical pressure sensor is also described.
Claims10
A micromechanical pressure sensor for detecting ambient pressure, comprising:
- a sensor element having a measurement variable that varies depending on the ambient pressure;
- a metal housing enclosing the sensor element at least along edges of the sensor element by a housing wall of the metal housing;
- and
- a first protective compound which is introduced within the metal housing and in which the sensor element is embedded in a manner protected from an environment;
- wherein the housing wall is coated on both sides with a second protective compound.
A method for constructing a micromechanical pressure sensor for detecting ambient pressure in an environment, the method comprising the following steps:
- providing a metal housing having a housing wall delimiting an interior region;
- enclosing the housing wall with a second protective compound;
- arranging a sensor element having a measurement variable dependent on the ambient pressure in the interior region;
- and
- embedding the sensor element to protect the sensor element from the environment by filling a first protective compound inside the metal housing.
Dependencies are inferred from the claim text.