Forming method, forming apparatus, and article manufacturing method

A method of forming a composition on a substrate using a mold, wherein the mold has a contact surface that is to be brought into contact with the composition on the substrate and a cavity provided in a surface on an opposite side of the contact surface, the method comprising:

• supplying a gas into the cavity so as to increase a pressure in the cavity to deform the contact surface into a convex shape toward the substrate;
• relatively tilting the mold with respect to the substrate;
• bringing the contact surface and the composition on the substrate into contact with each other in a state in which the contact surface has been deformed in the supplying the gas and the mold has been relatively tilted in the relatively tilting;
• further supplying the gas into the cavity so as to increase a deformation amount of the contact surface after the contact surface and the composition start to contact each other in the bringing and in a state in which the mold remains relatively tilted;
• and
• decreasing the gas in the cavity so as to decrease the deformation amount of the contact surface after the further supplying the gas,
• wherein the decreasing the gas in the cavity is performed such that the entire contact surface of the mold contacts the composition.