Sawing Device for Forming Saw-Cuts into a Semiconductor Product and Method Therefor

A sawing device for forming saw-cuts into a semiconductor product, comprising:

• a carrier comprising a holding surface for holding the semiconductor product,
• a saw blade comprising a cutting edge, moveable relative to the carrier,
• a first position sensor for determining the position of a point on a free surface of the semiconductor product held by the carrier relative to said first position sensor,
• a second position sensor for determining the position of a point on the cutting edge of the saw blade relative to said second position sensor, and
• a control unit linked to the first position sensor and the second position sensor, which control unit is configured for controlling the relative movement of the saw blade and the carrier,
• wherein the sawing device further comprises a reference for linking the position of the first position sensor to the position of the second position sensor;
• wherein the reference is fixed to the first position sensor or to the second position sensor via a holder;
• and
• wherein the control unit is configured to:
• process, with aid of the reference, the positions determined by the first position sensor and the second position sensor into a position of the point on the free surface of the semiconductor product relative to the point on the cutting edge of the saw blade, and
• control the relative movement of the saw blade and the carrier based on said position of the point on the free surface of the semiconductor product relative to the point on the cutting edge of the saw blade, and
• wherein the reference is formed by a reference surface on the holder observable by the first position sensor or the second position sensor, wherein the first position sensor or the second position sensor is configured for determining the position of a point on the reference surface, and
• wherein a distance spanned by the holder between the reference and the first position sensor or the second position sensor is known and invariable. ;