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US 2026/0208348 A1Published application
Robot for use in vacuum environment
AssigneeKawasaki Jukogyo Kabushiki Kaisha
InventorsRyota ONO, Takeshi SHIBATA
Life of this patent
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Abstract
In a robot (100) for use in a vacuum environment, a drive (30) is configured to drive a plurality of arm units (10) connected to each other in conjunction with each other such that a robot arm (1) operates to move a hand (13) within a circular range in a horizontal plane. An interior (1b) of the robot arm (1) is at atmospheric pressure.
Claims11
A robot for use in a vacuum environment, the robot comprising:
- a hand to support a substrate;
- a horizontal articulated robot arm to allow the hand to be attached thereto and including a plurality of arm units for use inside a vacuum chamber, the plurality of arm units being connected to each other;
- and
- a drive to drive the robot arm;
- wherein
- the drive is configured to drive the plurality of arm units connected to each other in conjunction with each other such that the robot arm operates to move the hand within a circular range in a horizontal plane;
- and
- an interior of the robot arm is at atmospheric pressure.
5 more elements
Dependencies are inferred from the claim text.