US 2026/0208318 A1 · SEMICONDUCTOR TOOL

Abstract

A semiconductor tool includes a grinding wheel configured to rotate around a first axis, a chuck table configured to rotate around a second axis offset from the first axis, and a plurality of adjustment shafts disposed at a peripheral portion of the chuck table. The chuck table includes an edge contour where an edge of the grinding wheel is projected onto the chuck table, and a wheel center where a center of the grinding wheel is projected onto the chuck table. The plurality of adjustment shafts are configured to adjust an inclination of the chuck table, wherein each of the plurality of adjustment shafts are disposed on an extending line extending from the wheel center toward a point on the edge contour.

Claims20

Dependent claims

A semiconductor tool, comprising:

a grinding wheel configured to rotate around a first axis;
a chuck table configured to rotate around a second axis offset from the first axis, wherein the chuck table comprises an edge contour where an edge of the grinding wheel is projected onto the chuck table, and a wheel center where a center of the grinding wheel is projected onto the chuck table;
and
a plurality of adjustment shafts disposed at a peripheral portion of the chuck table and configured to adjust an inclination of the chuck table, wherein each of the plurality of adjustment shafts are disposed on an extending line extending from the wheel center toward a point on the edge contour, more than one of the plurality of adjustment shafts raise or lower respective portions of the chuck table during adjusting the inclination of the chuck table.

1 more element

Dependencies are inferred from the claim text.

Semiconductor tool

Life of this patent

Semiconductor tool

Life of this patent

Abstract

Claims20