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US 2026/0208286 A1Published application
Processing apparatus, processing system, and manufacturing method of movable body
AssigneeNikon Corporation
InventorsMasayuki SHIRAISHI, Shigeki EGAMI, Yoshio KAWABE, Yosuke TATSUZAKI, Baku OGASAWARA
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Abstract
A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.
Claims15
A processing system comprising:
- a light irradiation apparatus that is configured to irradiate a surface of an object with processing light to process a first area on the surface;
- a measurement apparatus that is configured to measure a feature point of the first area that has been processed;
- and
- a controller,
- wherein
- the controller is configured to control, based on a measured result by the measurement apparatus, the light irradiation apparatus to process a second area, whose position is different from a position of the first area, on the surface by controlling a positional relationship between the object and an irradiation area of the processing light on the surface along a direction that is along the surface of the object.
3 more elements
A processing method comprising:
- irradiating a surface of an object with processing light to process a first area on the surface;
- measuring a feature point of the first area that has been processed;
- and
- based on a measured result by the measurement apparatus, processing a second area, whose position is different from a position of the first area, on the surface by changing a positional relationship between the object and an irradiation area of the processing light on the surface along a direction that is along the surface of the object.
1 more element
Dependencies are inferred from the claim text.