Liquid adhesion apparatus and liquid adhesion method
AssigneeLintec Corporation
InventorTakuya HAYASAKA
Life of this patent
Estimating the term…
Abstract
A liquid adhesion apparatus that causes a liquid to adhere to an adherend surface of an adherend to which a pellicle film is to be attached, includes: a liquid storage unit that stores the liquid in a liquid storage portion including an opening; a liquid supply unit that supplies the liquid to the liquid storage portion; and a liquid adhesion unit that causes the liquid to adhere to the adherend surface by bringing the adherend surface of the adherend into contact with the liquid stored in the liquid storage portion, in which the liquid supply unit includes a controller that controls an amount of the liquid to be supplied to the liquid storage portion.
Claims4
A liquid adhesion apparatus configured to cause a liquid to adhere to an adherend surface of an adherend to which a pellicle film is to be attached, the apparatus comprising:
- a liquid storage unit configured to store the liquid in a liquid storage portion including an opening;
- a liquid supply unit configured to supply the liquid to the liquid storage portion;
- and
- a liquid adhesion unit configured to cause the liquid to adhere to the adherend surface by bringing the adherend surface of the adherend into contact with the liquid stored in the liquid storage portion,
- wherein the liquid supply unit includes a controller configured to control an amount of the liquid to be supplied to the liquid storage portion.
A liquid adhesion method for causing a liquid to adhere to an adherend surface of an adherend to which a pellicle film is to be attached, the method comprising:
- storing the liquid in a liquid storage portion including an opening;
- supplying the liquid to the liquid storage portion;
- and
- causing the liquid to adhere to the adherend surface by bringing the adherend surface of the adherend into contact with the liquid stored in the liquid storage portion,
- wherein the supplying of the liquid includes controlling an amount of the liquid to be supplied to the liquid storage portion.
Dependencies are inferred from the claim text.