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US 2026/0206584 A1Published application
Irregular direct bonded metal (dbm) and connection substrate
AssigneeSemiconductor Components Industries, LLC
InventorsXiaoYing YUAN, DingHao WU, AnAn XING, Cheng HU, Jie CHANG, Keunhyuk LEE
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Abstract
Described implementations provide an apparatus that includes a conductive portion of a package, including a die attach pad (DAP), a semiconductor die coupled to the DAP, and a direct bonded metal (DBM) substrate including at least a metal layer coupled to a dielectric layer, the semiconductor die and the DAP being included in a first vertical stack separated from a second vertical stack including the DBM substrate.
Claims24
An apparatus, comprising:
- a conductive portion of a package, including a die attach pad (DAP);
- a semiconductor die coupled to the DAP;
- and
- a direct bonded metal (DBM) substrate including at least a metal layer coupled to a dielectric layer,
- the semiconductor die and the DAP being included in a first vertical stack separated from a second vertical stack including the DBM substrate.
2 more elements
An apparatus, comprising:
- a conductive portion of a package, including a die attach pad (DAP);
- a semiconductor die coupled to the DAP;
- and
- a direct bonded metal (DBM) substrate including at least a metal layer coupled to a dielectric layer,
- the semiconductor die and the DAP being included in a first vertical stack separated from and non-overlapping with a second vertical stack including the DBM substrate;
- and
- wherein the first vertical stack of the semiconductor die and the DAP is vertically disposed above or on a DBM recess, wherein the DBM recess is laterally adjacent to the second vertical stack of the DBM substrate.
4 more elements
A method of making a package, comprising:
- forming a direct bonded metal (DBM) substrate including at least a metal layer coupled to a dielectric layer;
- forming a conductive region of the package including a die attach pad (DAP);
- and
- coupling a semiconductor die to an upper surface of the DAP;
- the semiconductor die and the DAP being included in a first vertical stack separated from a second vertical stack of the DBM substrate.
2 more elements
Dependencies are inferred from the claim text.