Transfer head and semiconductor manufacturing apparatus including the same

A transfer head comprising:

• a horizontal body extending in a first direction;
• vertical arms connected to opposite peripheral portions of the horizontal body, respectively, the vertical arms extending in parallel to each other in a second direction perpendicular to the first direction, and each of the vertical arms having a side surface facing inward;
• and
• graspers that are connected to lower ends of the vertical arms, respectively, and the graspers configured to hold a substrate,
• wherein a lower end portion of each of the vertical arms has a first thickness in a third direction perpendicular to the first and second directions,
• wherein an upper end portion of each of the graspers has a second thickness in the third direction,
• wherein the second thickness is greater than the first thickness, and
• wherein, for each grasper of the graspers, an upper surface of the grasper has a downward inclination from an inner surface of the grasper toward an outer surface of the grasper.

A semiconductor manufacturing apparatus comprising:

• a transfer head configured to hold a substrate;
• a horizontal arm connected to an upper end of the transfer head;
• a vertical driving shaft connected to a first side of the horizontal arm, and the vertical driving shaft being configured to move in a first direction, a second direction perpendicular to the first direction, and a third direction perpendicular to the first and second directions;
• and
• a first cleaning module configured to hold a cleaning liquid,
• wherein the transfer head includes:
• a horizontal body extending in the first direction;
• vertical arms connected to opposite peripheral portions of the horizontal body, respectively, the vertical arms extending in parallel to each other in the second direction, and each of the vertical arms having a side surface facing inward;
• and
• graspers connected to lower ends of the vertical arms, respectively, and configured to accommodate the substrate,
• wherein each of the vertical arms has a thickness in the third direction, and
• wherein, for each vertical arm of the vertical arms, the thickness of the vertical arm in the third direction decreases in a direction extending from an inner surface of the vertical arm to an outer surface of the vertical arm.