Transport device, transport system using the same and operation method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYen I LEE, Chun-Jung HUANG, Chin-Lung TSAI, Fu-Hsien LI
Life of this patent
Estimating the term…
Abstract
A transport device for holding a wafer container is provided. The transport device includes a vehicle, a gas cylinder, a first grip and a second grip. The gas cylinder is disposed on the vehicle and configured to supply a gas to an inside of the wafer container. The first grip is slidably disposed on the vehicle. The second grip is slidably disposed on the vehicle. The first grip and the second grip are configured to grip the wafer container.
Claims20
An transport device, for holding a wafer container, comprising:
- a vehicle;
- a gas cylinder disposed on the vehicle and configured to supply a gas to an inside of the wafer container;
- a first grip slidably disposed on the vehicle;
- and
- a second grip slidably disposed on the vehicle;
- wherein the first grip and the second grip are configured to grip the wafer container.
A transport system, for transporting a wafer container, comprising:
- a track;
- and
- a transport device movably connected to the track, and comprising:
- a vehicle;
- a gas cylinder disposed on the vehicle and configured to supply a gas to an inside of the wafer container;
- a first grip slidably disposed on the vehicle;
- and
- a second grip slidably disposed on the vehicle;
- wherein the first grip and the second grip are configured to grip the wafer container.
An operation method, comprising:
- providing an transport device, wherein the transport device comprises a vehicle, a gas cylinder, a first grip and a second grip, the gas cylinder is disposed on the vehicle, the first grip and the second grip are slidably disposed on the vehicle;
- gripping the wafer container by the first grip and the second grip;
- and
- supplying a gas to an inside of the wafer container when the wafer container is gripped by the first grip and the second grip.
Dependencies are inferred from the claim text.