Dicing methods
AssigneeAsmpt Singapore Pte. Ltd.
InventorsNiels ZIJLSTRA, Alexander NAUMOV
Life of this patent
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Abstract
A method for breaking a substantially planar workpiece having first and second major surfaces, with a metallization layer on the first major surface, comprises the steps of: i) forming a groove in the workpiece extending parallel to the plane, the groove being open at an upper surface of the workpiece, and then subsequently ii) applying a workpiece breaking force to the first major surface of the workpiece to crack the workpiece along a break line coincident with the groove, then iii) applying a metallization breaking force to the second major surface of the workpiece to break the metallization layer along the break line.
Claims20
A method for breaking a substantially planar workpiece having first and second major surfaces, with a metallization layer on the first major surface, comprising the steps of:
- i) forming a groove in the workpiece extending parallel to the plane, the groove being open at an upper surface of the workpiece, and then subsequently
- ii) applying a workpiece breaking force to the first major surface of the workpiece to crack the workpiece along a break line coincident with the groove, then
- iii) applying a metallization breaking force to the second major surface of the workpiece to break the metallization layer along the break line.
A method for scribing a substantially planar workpiece, comprising the steps of:
- i) irradiating the workpiece with a first irradiation pattern of incident laser light while moving the workpiece relative to the incident laser light in a translation direction, to form a groove in the workpiece extending parallel to the plane, the groove being open at an upper surface of the workpiece and having a first sectional shape with a first depth d1, and then subsequently
- ii) irradiating the workpiece with a second irradiation pattern of incident laser light, while moving the workpiece relative to the incident laser light in a direction parallel to the translation direction, to modify an upper portion of the groove, the upper portion having a depth d2, where d2<d1, to produce a modified groove having a second sectional shape different to the first sectional shape.
Dependencies are inferred from the claim text.