A method of manufacturing a monolithic display
AssigneeSmartkem Limited
InventorsSimon OGIER, Daniel SHARKEY, Chia Hung TSAI
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Abstract
A method of fabricating a monolithic micro-LED display component (2), the method comprising: depositing an LED (210) on a top surface (205a) of a substrate (205); depositing a base layer (240) over the LED (210), the base layer (240) forming a planar layer isolating the LED (210); processing an organic thin film transistor (260), OTFT, on the base layer (240) by depositing source and drain electrodes (256, 258) and an active channel comprising an organic semiconducting layer (262); and after processing of the OTFT (260), etching a base layer via (242, 244), the base layer via (242, 244) comprising a via through the base layer (240) to allow a connection between the LED (210) and the OTFT (260).
Claims20
A method of fabricating a monolithic micro-LED display component, the method comprising:
- depositing an LED on a top surface of a substrate;
- depositing a base layer over the LED, the base layer forming a planar layer isolating the LED;
- processing an organic thin film transistor, OTFT, on the base layer by depositing source and drain electrodes and an active channel comprising an organic semiconducting layer;
- and after processing of the OTFT,
- etching a base layer via, the base layer via comprising a via through the base layer to allow a connection between the LED and the OTFT.
A monolithic micro-LED display component, comprising:
- an LED having a top surface and an opposing bottom surface;
- a planar base layer formed above the top surface of the LED;
- an organic thin film transistor, OTFT, processed at least partially on an upper surface of the planar base layer;
- a passivation layer deposited on the OTFT;
- and
- a base layer via etched through both the base layer and the passivation layer, whereby to allow an electrical connection between the LED and the OTFT.
Dependencies are inferred from the claim text.