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US 2026/0206197 A1Published application
Mapping device and mapping method using the same
AssigneeSamsung Display Co., Ltd.
InventorsMYUNGKYU KIM, KYONGHO HONG, CHANG-KON PARK, SUKBEOM YOU, DONGJAE LEE
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Abstract
A mapping device includes: a substrate engraved with an alignment pattern; an electrostatic chuck under the substrate and in contact with the substrate; and an anti-separation frame on the substrate and preventing the substrate from being separated.
Claims9
A mapping method comprising:
- placing a mapping device engraved with an alignment pattern on an equipment comprising a first axis extending in a first direction and an imaging unit;
- allowing the imaging unit to scan the mapping device on the equipment;
- and
- correcting coordinates on the equipment, the mapping device comprising:
- a substrate engraved with the alignment pattern;
- an electrostatic chuck under the substrate and in contact with the substrate;
- and
- an anti-separation frame on the substrate and preventing the substrate from being separated.
5 more elements
Dependencies are inferred from the claim text.