Euv utilization system and method
AssigneeASML Netherlands B.V.
InventorsJasper Pierre BECKERS, Hubertus Johannes VAN DE WIEL, Edwin TE SLIGTE, Kramer Daniel HARRISON, William Peter VAN DRENT
Life of this patent
Estimating the term…
Abstract
A EUV utilization system comprising a radiation source comprising a drive laser configured to generate drive laser radiation for irradiating a fuel and thereby generating extreme ultraviolet radiation. The EUV utilization system comprises a EUV utilization apparatus configured to receive extreme ultraviolet radiation directed through an optical aperture located between the radiation source and the EUV utilization apparatus. The EUV utilization apparatus comprises a radiation shield configured to block at least a portion of the drive laser radiation that propagates through the optical aperture.
Claims18
1-23. (canceled)
An extreme ultraviolet (EUV) utilization system comprising:
- a radiation source comprising a drive laser configured to generate a drive laser beam that is configured to irradiate a fuel and thereby generate extreme ultraviolet radiation, wherein the radiation source is configured to generate a cone of EUV radiation, wherein the cone comprises a hole in which no extreme ultraviolet radiation is present;
- and
- an EUV utilization apparatus configured to receive extreme ultraviolet radiation directed through an optical aperture located between the radiation source and the EUV utilization apparatus, wherein the EUV utilization apparatus comprises a radiation shield located at a position in the EUV utilization apparatus that coincides with the hole of the cone of extreme ultraviolet radiation such that substantially no EUV radiation is blocked by the radiation shield while substantially all of the drive laser beam that propagates through the optical aperture is blocked by the radiation shield.
A method of providing EUV radiation to a EUV utilization apparatus comprising:
- irradiating a fuel with a drive laser beam to generate a cone of EUV radiation wherein the cone comprises a hole in which no extreme ultraviolet radiation is present;
- directing the EUV radiation to the EUV utilization apparatus through an optical aperture;
- and
- blocking substantially all of the drive laser beam that propagates through the optical aperture with a radiation shield located at a position in the EUV utilization apparatus that coincides with the hole of the cone of EUV radiation such that substantially no EUV radiation is blocked by the radiation shield.
A method of manufacturing an EUV utilization system comprising:
- providing a radiation source comprising a drive laser configured to generate a drive laser beam for irradiating a fuel and thereby generate a cone of EUV radiation wherein the cone comprises a hole in which no EUV radiation is present;
- providing an EUV utilization apparatus configured to receive the EUV radiation directed through an optical aperture located between the radiation source and the EUV utilization apparatus;
- and
- arranging a radiation shield in the EUV utilization apparatus to block substantially all of the drive laser beam that propagates through the optical aperture, wherein the radiation shield is located at a position in the EUV utilization apparatus that coincides with the hole of the cone of EUV radiation such that substantially no EUV radiation is blocked by the radiation shield.
Dependencies are inferred from the claim text.