Surface acoustic wave device having a trapezoidal electrode
AssigneeSkyworks Solutions, Inc.
InventorsRei Goto, Keiichi Maki, Yuya Hiramatsu
Life of this patent
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Abstract
A surface acoustic wave device can have a piezoelectric layer and at least one interdigital transducer electrode thereon with a trapezoidal shape. This can be useful to fill dead space or voids between nonparallel elements on the layer. For example, an array with ranks of slanted interdigital transducer electrodes may not be aligned with non-slanted elements (e.g., a surface acoustic wave filter). This can leave voids or openings with unused portions of the piezoelectric layer. Trapezoidal elements such as those described here can solve this problem and help suppress transverse modes.
Claims21
(canceled)
A surface acoustic wave device comprising:
- a piezoelectric layer having a propagation axis;
- a plurality of slanted interdigital transducer electrodes arranged on the piezoelectric layer, the plurality of slanted interdigital transducer electrodes have a different alignment than the propagation axis;
- and
- at least one trapezoidal interdigital transducer electrode arranged on the piezoelectric layer, the at least one trapezoidal interdigital transducer electrode having one side aligned with the propagation axis and one side aligned with the plurality of slanted interdigital transducer electrodes.
A surface acoustic wave device comprising:
- a multilayer piezoelectric substrate including a support substrate and a piezoelectric layer over the support substrate;
- and
- at least one trapezoidal interdigital transducer electrode over the piezoelectric layer and having a trapezoidal shape when viewed from above the piezoelectric layer, the at least one trapezoidal interdigital transducer electrode positioned in a tessellating manner adjacent to slanted elements on the piezoelectric layer.
A surface acoustic wave filter comprising:
- a piezoelectric layer having an edge;
- a plurality of slanted elements that are slanted with respect to the edge;
- and
- at least one trapezoidal interdigital transducer electrode over the piezoelectric layer and having at least one side parallel to the edge and one side parallel to at least one of the plurality of slanted elements.
Dependencies are inferred from the claim text.