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US 2026/0205093 A1Published application
Surface acoustic wave device with heavy metal electrode stack
AssigneeQorvo US, Inc.
InventorsChristian Huck, Marc Solal, Casey Kirkpatrick, Patrik Rath, Sebastian Huebner
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Abstract
A surface acoustic wave, SAW, device comprises a piezo-electric substrate (12) with at least one electrode (20A, 20b) on a top surface of the piezoelectric substrate. The electrode is formed from an electrode stack (40) comprising a first heavy metal layer (42) formed from a heavy electrode metal and a first conducting layer (44) formed from a conducting material stacked over one another.
Claims31
A surface acoustic wave (SAW) device, comprising:
- a piezoelectric substrate;
- at least one electrode on a top surface of the piezoelectric substrate and formed from an electrode stack comprising a first heavy metal layer formed from a heavy electrode metal having a mass density higher than or equal to molybdenum and a first conducting layer formed from a conducting material stacked over one another.
A method for fabricating a surface acoustic wave (SAW) device, comprising:
- providing a piezoelectric substrate;
- and
- providing at least one electrode on a top surface of the piezoelectric substrate and formed from an electrode stack comprising a first heavy metal layer formed from a heavy electrode metal having a mass density higher than or equal to molybdenum and a first conducting layer formed from a conducting material stacked over one another.
30-36. (canceled)
Dependencies are inferred from the claim text.