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US 2026/0204876 A1Published application
Optical semiconductor device
AssigneeLumentum Operations LLC
InventorsYuga KODAMA, Atsushi NAKAMURA, Masaru ONGA
Life of this patent
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Abstract
A top surface of the first buried layer has a first sloped portion which slopes in a width direction of the mesa structure so as to be closer to the substrate as a distance from the mesa structure increases. A top surface of the second buried layer has a second sloped portion which slopes in the width direction so as to be closer to the substrate as a distance from the mesa structure increases. The electrode covers entirety of the first sloped portion and entirety of the second sloped portion.
Claims20
An optical semiconductor device, comprising:
- a substrate;
- a mesa structure which protrudes from the substrate and extends in an extending direction parallel to the substrate, and which includes an active layer;
- a first buried layer of a semiconductor and a second buried layer of the semiconductor, the first buried layer being placed on a first side of the mesa structure in a section perpendicular to the extending direction, the second buried layer being placed on a second side of the mesa structure in the section;
- and
- an electrode which is formed on the mesa structure and which is partially placed on the first buried layer and the second buried layer,
- wherein a top surface of the first buried layer has a first sloped portion which slopes in a width direction of the mesa structure so as to be closer to the substrate as a distance from the mesa structure increases,
- wherein a top surface of the second buried layer has a second sloped portion which slopes in the width direction so as to be closer to the substrate as a distance from the mesa structure increases,
- wherein the electrode covers an entirety of the first sloped portion and an entirety of the second sloped portion.
5 more elements
Dependencies are inferred from the claim text.