Multi-charged particle beam writing method, multi-charged particle beam writing apparatus and computer readable recording medium
AssigneeNuFlare Technology, Inc.
InventorsTetsushi KOKUBO, Hiroshi MATSUMOTO
Life of this patent
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Abstract
In one embodiment, a multi-charged particle beam writing method includes a step of setting, in a writing region of a sample, a plurality of writing grids obtained by shifting a plurality of ideal grids by a shift amount with anisotropy, the plurality of ideal grids being arranged in a lattice pattern with an equal pitch, and a step of writing a pattern on the sample by irradiating the plurality of writing grids with a multi-beam.
Claims12
A multi-charged particle beam writing method comprising:
- a step of setting, in a writing region of a sample, a plurality of writing grids obtained by shifting a plurality of ideal grids by a shift amount with anisotropy, the plurality of ideal grids being arranged in a lattice pattern with an equal pitch;
- and
- a step of writing a pattern on the sample by irradiating the plurality of writing grids with a multi-beam.
A multi-charged particle beam writing apparatus comprising:
- a writing grid setter that sets, in a writing region of a sample, a plurality of writing grids obtained by shifting a plurality of ideal grids by a shift amount with anisotropy, the plurality of ideal grids being arranged in a lattice pattern with an equal pitch;
- and
- a writer that writes a pattern on the sample using a multi-beam so that the plurality of writing grids are irradiated.
A non-transitory computer readable recording medium storing a program causing a computer to execute a process comprising:
- setting, in a writing region of a sample, a plurality of writing grids obtained by shifting a plurality of ideal grids by a shift amount with anisotropy, the plurality of ideal grids being arranged in a lattice pattern with an equal pitch;
- and
- writing a pattern on the sample using a multi-beam by controlling a writer so that the plurality of writing grids are irradiated.
Dependencies are inferred from the claim text.