Pellicle structure for euv lithography and methods of manufacturing thereof

Abstract

A method of manufacturing a pellicle includes heating a membrane including a plurality of carbon nanotubes at a temperature sufficient to convert amorphous carbon to crystalline carbon. The membrane is heated in a chamber having an oxygen content less than air. A pellicle is formed using the membrane after the heating the membrane. In an embodiment, the membrane includes a plurality of carbon shells having a first level of crystallinity, and during the heating the membrane, the plurality of carbon shells having the first level of crystallinity are converted to a plurality of carbon shells having a second level of crystallinity, where the second level of crystallinity is greater than the first level of crystallinity. In an embodiment, the membrane includes a metal catalyst at a first concentration, and during the heating the membrane, the first concentration of the metal catalyst decreases to a second concentration.

Dependencies are inferred from the claim text.