Photodetector, modulator, semiconductor device and semiconductor apparatus

A modulator comprising a longitudinal section of a waveguide, which comprises or is formed by four waveguide segments extending in the longitudinal direction and at least substantially parallel to one another, and two active elements comprising or consisting of at least one material whose refractive index changes as a function of a voltage and/or the presence of charge and/or electric field, or one such active element and an electrode, wherein a lower one of the waveguide segments is arranged between the two active elements or between the active element and the electrode, a middle one of the waveguide segments is arranged above the two active elements or above the active element and the electrode and the two remaining, upper waveguide segments are arranged above the middle waveguide segment, wherein the two upper waveguide segments are spaced apart from each other forming a gap extending therebetween.

A modulator comprising a longitudinal section of a waveguide, which comprises or is formed by five waveguide segments extending in the longitudinal direction and at least substantially parallel to one another, and two active elements comprising or consisting of at least one material whose refractive index changes as a function of a voltage and/or the presence of charge and/or an electric field, or such an active element and an electrode, wherein two lower ones of the waveguide segments are arranged below the active elements or below the active element and the electrode and are spaced apart from each other forming a gap extending therebetween, and a first middle one of the waveguide segments is arranged between the two active elements or between the active element and the electrode, and a second middle waveguide segment is arranged above the two active elements or above the active element and the electrode, and an upper waveguide segment is arranged above the second middle waveguide segment.

A modulator comprising a longitudinal section of a waveguide, which comprises or is formed by six waveguide segments extending in the longitudinal direction and at least substantially parallel to one another, and two active elements comprising or consisting of at least one material whose refractive index changes as a function of a voltage and/or the presence of charge and/or an electric field, or such an active element and an electrode, wherein two lower ones of the waveguide segments are arranged below the active elements or below the active element and the electrode and are spaced apart from one another forming a gap extending therebetween, and a first middle one of the waveguide segments is arranged between the two active elements or between the active element and the electrode, and a second middle waveguide segment is arranged above the two active elements or above the active element and the electrode, and the two remaining upper waveguide segments are arranged above the second middle waveguide segment wherein the two upper waveguide segments are spaced apart from each other forming a gap extending therebetween.

-23. (canceled)