Backfilled Evacuated Periodic Structures and Methods of Manufacture

Abstract

Disclosed herein is a method for recording a grating structure and the resultant grating structure. In one example, the method includes: depositing a holographic mixture containing a mixture of monomer and inert material onto a first substrate; exposing the holographic mixture to form a nanostructure including polymer-rich and inert-material rich regions using a holographic exposure phase separation process; removing the inert material from the inert material rich regions to form a grating including polymer rich regions and regions containing a residual polymer network; applying an ashing process to the regions containing a residual polymer network to form an ashed grating comprising polymer-rich regions and air regions; depositing a coating material onto the ashed grating to form a coated grating where the coating material backfills the air regions and overcoats the polymer-rich regions.

Dependencies are inferred from the claim text.