Determination method, storage medium, substrate processing apparatus, and information processing apparatus

A non-transitory computer-readable storage medium storing a determination program that causes a computer to perform a process comprising:

• (a) performing spectroscopic measurement of a substrate, in which a pattern including a recess is formed and a filling material is filled in the recess, to measure either one of an absorbance spectrum or a reflectance spectrum of the substrate;
• and
• (b) determining a filled state of the recess from an integral value of a spectral value for each wavelength range of a plurality of wavelength ranges of the one spectrum of the substrate measured in step (a), by using a model generated by performing machine learning on data associating a plurality of filled states of recesses with integral values of spectral values for each wavelength range of the one spectrum of a plurality of substrates in which the filling material is filled.

A substrate processing apparatus comprising:

• a measurer configured to perform spectroscopic measurement of a substrate, in which a pattern including a recess is formed and a filling material is filled in the recess, to measure either one of an absorbance spectrum or a reflectance spectrum of the substrate;
• and
• a determinator configured to determine a filled state of the recess from an integral value of a spectral value for each wavelength range of a plurality of wavelength ranges of the one spectrum of the substrate measured by the measurer, by using a model generated by performing machine learning on data associating a plurality of filled states of recesses with integral values of spectral values for each wavelength range of the one spectrum of a plurality of substrates in which the filling material is filled.

An information processing apparatus comprising:

• an acquisitor configured to acquire, from a measurer that performs spectroscopic measurement of a substrate in which a pattern including a recess is formed and a filling material is filled in the recess, to measure either one of an absorbance spectrum or a reflectance spectrum of the substrate, data on the one spectrum of the substrate;
• and
• a determinator configured to determine a filled state of the recess from an integral value of a spectral value for each wavelength range of a plurality of wavelength ranges of the one spectrum of the substrate indicated in the data acquired by the acquisitor, by using a model generated by performing machine learning on data associating a plurality of filled states of recesses with integral values of spectral values for each wavelength range of the one spectrum of a plurality of substrates in which the filling material is filled.