Apparatus for force measurement
AssigneeInfineon Technologies AG
InventorsHorst THEUSS, Thomas MÜLLER, Andreas ALLMEIER, Klaus ELIAN
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Abstract
An apparatus for force measurement includes a cavity package and a pressure sensor arranged in the cavity package. Additionally, the apparatus includes a first material and a second material arranged in the cavity package. The first material encloses the pressure sensor. The second material covers the first material, exhibits a higher Young's modulus than the first material, and is configured to transfer an external force applied to the second material to the first material. The pressure sensor is configured to measure pressure within the first material resulting from the external force.
Claims20
An apparatus for force measurement, the apparatus comprising:
- a cavity package;
- a pressure sensor arranged in the cavity package;
- and
- a first material and a second material arranged in the cavity package,
- wherein the first material encloses the pressure sensor,
- wherein the second material covers the first material exhibits a higher Young's modulus than the first material and is configured to transfer an external force applied to the second material to the first material and
- wherein the pressure sensor is configured to measure pressure within the first material resulting from the external force.
Dependencies are inferred from the claim text.