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US 2026/0202227 A1Published application
Methods of manufacturing plasma generating cells for a plasma source
AssigneeApplied Materials, Inc.
InventorsDavid John Jorgensen, Jian Wu, Vladimir Nagorny, Hugo Rivera
Life of this patent
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Abstract
A plasma source includes a holding structure and a plurality of plasma generating cells coupled to the holding structure. Each plasma generating cell includes a base structure including a dielectric rod, a plurality of electrodes disposed on an outer surface of the dielectric rod, and a dielectric layer disposed over at least a region of the plurality of electrodes to form a dielectric barrier discharge (DBD) region.
Claims20
A plasma source, comprising:
- a holding structure;
- a plurality of plasma generating cells coupled to the holding structure, wherein each plasma generating cell of the plurality of plasma generating cells comprises:
- a base structure comprising a dielectric rod;
- a plurality of electrodes disposed on an outer surface of the dielectric rod, wherein adjacent electrodes of the plurality of electrodes are separated by a gap;
- and
- a dielectric layer disposed over at least a first region of the plurality of electrodes to form a dielectric barrier discharge (DBD) region.
3 more elements
A plasma generating cell, comprising:
- a base structure comprising a dielectric rod, wherein the base structure is configured to couple to a holding structure;
- a plurality of electrodes disposed on an outer surface of the dielectric rod, wherein adjacent electrodes of the plurality of electrodes are separated by a gap;
- and
- a dielectric layer disposed over at least a first region of the plurality of electrodes to form a dielectric barrier discharge (DBD) region.
1 more element
A plasma generation system, comprising:
- at least one plasma generating cell, wherein the at least one plasma generating cell comprises:
- a base structure comprising a dielectric rod;
- a plurality of electrodes disposed on an outer surface of the dielectric rod, wherein adjacent electrodes of the plurality of electrodes are separated by a gap;
- and
- a dielectric layer disposed over at least a region of the plurality of electrodes to form a dielectric barrier discharge (DBD) region.
2 more elements
Dependencies are inferred from the claim text.