Telecentric interferometer, method for determining a characteristic of an input light field, and interferometer assembly
OwnerMartin BERZinventor
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OwnerMartin BERZinventor
Estimating the term…
A telecentric interferometer, a method for determining a characteristic of an input light field, and an interferometer assembly are disclosure. A telecentric interferometer comprises a frontside optics with an exit pupil, a first optical system with a first interferometer arm, a second optical system with a second interferometer arm, a detector, and a shifting unit located between the frontside optics and the detector. The first optical system and the second optical system have an identical object-side focal length, an identical Gauss image distance, and an identically positioned object-side principal plane with an identical object-side optical axis. The exit pupil of the frontside optics is distanced to the object-side principal plane by the object-side focal length. The shifting unit shifts an image-side principal plane of the first optical system and/or an image-side principal plane of the second optical system such that the image-side principal plane of the first optical system is different from the image-side principal plane of the second optical system and an optical path length of the first interferometer arm is equal to an optical path length of the second interferometer arm.
Telecentric interferometer, comprising:
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